BSE detector
The externally mounted backscattered electron (BSE) detector is used to map the atomic number contrast of materials within a sample. This method allows different material phases in a sample to be distinguished quickly and easily on the basis of their chemical/elemental composition. Materials that are composed of relatively heavier elements appear brighter.
Energy dispersive X-ray microanalysis system
The SEM is also equipped with an energy dispersive X-ray microanalysis system, EDX for short. With this analytical add-on, element distribution images can be generated in the samples to be analyzed.
The measuring principle is as follows: When the electron beam used to generate the image interacts with the sample, X-rays characteristic of the elements contained in the sample are produced, among other things. The detector receives this radiation and displays the signal either as an energy spectrum or as a flat image with different colors for individual elements. This allows the chemical composition of examined samples to be determined quickly.
